收录:
摘要:
A room temperature IR detector is designed by using the principle of IR absorption gas directly absorbing IR radiation. After the gas within a closely sealed cavity absorbs IR radiation, the enlarged pressure intensity within the cavity makes the thin film deform. The size of IR radiation can be measured from the capacitive variation quantity of a micro-capacitance which uses the elastic thin film as movable polar plate. The detector made with MEMS technology is sensitive for 8 - 14 μm IR radiation and its sensitivity ≥ 2 × 10-3 pF/mW.
关键词:
通讯作者信息:
电子邮件地址: