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作者:

Li, L. (Li, L..) | Shen, G.-D. (Shen, G.-D..) | Zou, D.-S. (Zou, D.-S..) | Liu, Z. (Liu, Z..) | Deng, J. (Deng, J..) | Yang, D.-H. (Yang, D.-H..) | Wu, J.-M. (Wu, J.-M..)

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Scopus PKU CSCD

摘要:

A room temperature IR detector is designed by using the principle of IR absorption gas directly absorbing IR radiation. After the gas within a closely sealed cavity absorbs IR radiation, the enlarged pressure intensity within the cavity makes the thin film deform. The size of IR radiation can be measured from the capacitive variation quantity of a micro-capacitance which uses the elastic thin film as movable polar plate. The detector made with MEMS technology is sensitive for 8 - 14 μm IR radiation and its sensitivity ≥ 2 × 10-3 pF/mW.

关键词:

Elastic sensitive film; Infrared absorption gas; Infrared detector; Micromachine

作者机构:

  • [ 1 ] [Li, L.]Beijing Optoelectron. Technol. Lab., Sch. of Electron. Info., Beijing Univ. of Technology, Beijing 100022, China
  • [ 2 ] [Shen, G.-D.]Beijing Optoelectron. Technol. Lab., Sch. of Electron. Info., Beijing Univ. of Technology, Beijing 100022, China
  • [ 3 ] [Zou, D.-S.]Beijing Optoelectron. Technol. Lab., Sch. of Electron. Info., Beijing Univ. of Technology, Beijing 100022, China
  • [ 4 ] [Liu, Z.]Beijing Optoelectron. Technol. Lab., Sch. of Electron. Info., Beijing Univ. of Technology, Beijing 100022, China
  • [ 5 ] [Deng, J.]Beijing Optoelectron. Technol. Lab., Sch. of Electron. Info., Beijing Univ. of Technology, Beijing 100022, China
  • [ 6 ] [Yang, D.-H.]Beijing Optoelectron. Technol. Lab., Sch. of Electron. Info., Beijing Univ. of Technology, Beijing 100022, China
  • [ 7 ] [Wu, J.-M.]Beijing Optoelectron. Technol. Lab., Sch. of Electron. Info., Beijing Univ. of Technology, Beijing 100022, China

通讯作者信息:

  • [Li, L.]Beijing Optoelectron. Technol. Lab., Sch. of Electron. Info., Beijing Univ. of Technology, Beijing 100022, China

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来源 :

Opto-Electronic Engineering

ISSN: 1003-501X

年份: 2004

期: 2

卷: 31

页码: 34-36,43

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